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This is Vacuum Pump Dia.1.3mm 66L/min 0.55Mpa -84kPa manufactured by SMC. The manufacturer part number is ZM132H. Furthermore, it has a maximum 0.55mpa input pressure . Its nozzle diameter is approximately 1.3mm . In addition, it has a maximum 66l/min suction flow . It provides a 0.25 → 0.7mpa of operating pressure. The product has a zm manufacturer series. Whereas, the minimum operating temperature of the product is +5°c. It has a maximum -84kpa vacuum pressure . It has a maximum operating temperature of +60°c.
For more information please check the datasheets.
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